Infrared imaging is extensively used in industrial and medical applications, for example: thermography, night-vision, body temperature sensing for medical uses… Additionally, a lot of molecules absorb infrared wavelengths, which makes the detection of lots of chemical compounds possible by making use of their absorption spectrum. This has its applications in medical diagnosis and food quality control, for example.
In order to measure the spectrum of an infrared source, a Michelson interferometer could be used. In this setup, the light interferes with a delayed version which together generates an interference pattern. To introduce this delay, a movable mirror is used which generates displacements of tens of micrometers with an accuracy of tens of nanometers. From this interferogram, the spectrum can then be calculated using a fourier transform. In order to generate these small displacements with high accuracy, a MEMS-based solution seems very attractive.
 Saadany, B.; Omran, H.; Medhat, M.; Marty, F.; Khalil, D.; Bourouina, T., "MEMS tunable Michelson interferometer with robust beam splitting architecture," Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on , vol., no., pp.49,50, 17-20 Aug. 2009
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